POSITIVE TYPE RESIST COMPOSITION

摘要

PURPOSE:To provide a positive type resist compsn. excellent in balance of various properties such as sensitivity, resolution and profile and generating no scum. CONSTITUTION:This positive type resist compsn. contains an alkali-soluble resin and quinonediazidosulfonic esters of two or more of phenol compds. represented by general formulae I-TV (where each of R1-R42 is H, 1-4C alkyl or hydroxyl and R43 is H or 1-4C alkyl).