| 摘要 |
An energy analyzer, in which a pair of electrodes forms an electrostatic field for deflection, and entrance and exit aperture plates having an aperture are arranged in entrance and exit portions of the electrostatic field, in which a particle detector is arranged in front of the aperture of the exit aperture plate for detecting a particle passing through the electrostatic field and the apertures of the entrance and exit aperture plates to analyze energy of the particle, and a device controls a voltage distribution of the surface of at least the exit aperture plate to approximately equal to the voltage distribution of the electrostatic field. A velocity analyzer such as a Wien filter is also disclosed, and includes also a device for controlling a voltage distribution of the surfaces of second electrodes to approximately equal to the voltage distribution of the electrostatic field.
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