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经营范围
发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH02240257(A)
申请公布日期
1990.09.25
申请号
JP19890060117
申请日期
1989.03.13
申请人
FUJI ELECTRIC CO LTD
发明人
KONDO KENJI;ARISAWA TAKESHI;SAKAKIBARA YASUSHI;YAGINUMA SADAHIRO
分类号
C23C14/34;H01L21/203
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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