| 摘要 |
PURPOSE:To detect the angular velocity of a gas flow with high sensitivity and with high reliability by detecting a temperature difference of each thin film resistor formed as a detecting element on an insulator. CONSTITUTION:Detecting elements 7a, 7b are constituted of a thin film resistor 31 brought to pattern formation on an insulator 30, connected electrically to each electrode 6a, 6b, and integrated as a pair into two sides of a detecting circuit consisting of a bridge circuit. In such a state, when a gas pump 4 is energized gas in a pump chamber compressed by vibration of a diaphragm 4a flows to a passage 13 through discharge openings 4b, 5e of the diaphragm 4a and an electrode holder 5, passes through a nozzle hole 8 and an auxiliary port 9 and blown out as a gas flow 40 toward the elements 7a, 7b in a space part 1b, it is cooled equally, and thereafter, exhausted toward by diaphragm 4a from gas guide holes 5a, 5c, and the circulation of gas is repeated again. In such a state, when an angular velocity or acceleration is applied from the outside, the gas flow 40 is deflected in a casing 1 and a temperature difference is generated between each element 7a, 7b, therefore, it is detected as a voltage difference by the bridge circuit. |
