| 摘要 |
PURPOSE:To change the magnification rate of a pattern image by a method wherein a pair of lenses and a pattern source are relatively moved in the state where the distance between a pair of the lenses is kept constant, by forming an illumination source image and a pattern source image at the respectively specified positions, by using a first and a second illumination lenses and a first and a second imagery lenses. CONSTITUTION:By using a first illumination lens LL1, a first illumination source image i1, is formed outside the image space focus of a first imagery lens LI1; by using a second illumination lens LL2, said first illumination source image i1 is formed as a second illumination source image i1, outside the object space focus FI1, of the first imagery lens LI1; by using the first imagery lens LI1, outside the image space focus, a second illumination source image i2 is formed as a third illumination source i3 on the first illumination source i1 so as to be in the same magnification as the first illumi nation source image i1; the image of a pattern source 11 is formed as a first pattern source I1; by using a second imagery lens LI2, the third illumination source image i3 is formed at the allowable position of an entrance pupil of a projection lens LR, and the first pattern source image I1 is formed as a second pattern source image I2, in the range of the allowable focussing depth of the object space of the projection lens LR. |
