| 摘要 |
PURPOSE:To make the shape of a laser tube and the constitution of the whole device more compact and light-weighted without providing a discharge electrode inside the laser tube further to prolong the life of laser beam by a method wherein a microwave producer communicates with a microwave leading-in window provided on a laser tube through the intermediary of a waveguide. CONSTITUTION:The title excimer laser producer is composed of a laser tube 10 with laser resonators 11, 12 oscillating the excimer laser beams (a), a microwave producer 15 communicating with a microwave leading-in window 13 provided on the laser tube 10 through the intermediary of a waveguide 14 and a laser gas supply source 16 communication with the said laser tube 10. Then, for example,. the microwaves produced by the microwave producer 15 are led to the laser tube 10 from the waveguide 14 passing through the microwave leading-in window 13 while the laser gas previously fed from the laser gas supply source 16 to the laser tube 10 is excited to make the excited gas emit ultraviolet rays. Finally, the laser beams are oscillated between the reflector 11 and the output mirror 12 comprising the resonators 11, 12 so that the laser beams may be externally outputted as the excimer laser beams through the output mirror 12. |
