| 摘要 |
<p>PURPOSE:To obtain a thin film having satisfactory adhesive property by previously forming a glassy coating layer on a smooth ceramic substrate, firing the layer, forming a desired thin film on the layer and carrying out heat treatment. CONSTITUTION:An Al2O3 substrate is used as a ceramic substrate 1. A glassy coating soln. is sprayed on the Al2O3 substrate and dried to form a glassy coating layer 3. This layer 3 is melt-bonded to the substrate by firing in vacuum or in gaseous hydrogen or argon. A film of a desired thickness is then formed by sputtering and wet or dry-etched in the form of a desired pattern.</p> |
