| 摘要 |
PURPOSE:To prevent development of many scraps of silicon which attach onto a semiconductor element and cause defective connection and contact by recognizing a location deviation amount of a semiconductor element by a picture and by providing a recognition control means which gives a driving instruction to a re-positioning stage based on the deviation amount. CONSTITUTION:A semiconductor element 1 is arranged on a table 2. After a position of the element is automatically detected and recognized with a camera 3 for a table, positioning of the element 1 is carried out. A transfer arm 4 seals the element 1 and locates it to a re-positioning stage 5. A location deviation amount of the element 1 against a sealed section thereof is automatically detected with a camera 6a for a re-positioning stage. A control section 6b gives a movement amount to the stage 5 based on the detected signal corresponding to an amount of location deviation. A recognition control means to give a location deviation correcting instruction to the stage 5 is composed of the camera 6a, the control section 6b, etc. The stage 5 moves in a rotating direction, right and left to correct a location deviation of the semiconductor element 1. Thereby, silicon scraps do not develop and defective connection and contact can be eliminated. |
