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发明名称
DIAMOND SEMICONDUCTOR AND ITS PRODUCTION
摘要
申请公布号
JPH02239193(A)
申请公布日期
1990.09.21
申请号
JP19890060249
申请日期
1989.03.13
申请人
IDEMITSU PETROCHEM CO LTD
发明人
KAZAHAYA TOMIO;UESUGI TAKASHI;KATSUMATA SATOSHI
分类号
C30B29/04;H01L21/205
主分类号
C30B29/04
代理机构
代理人
主权项
地址
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