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发明名称
METHOD FOR GROWING SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH02239179(A)
申请公布日期
1990.09.21
申请号
JP19890056105
申请日期
1989.03.10
申请人
TOSHIBA CORP
发明人
UEMOTO TSUTOMU;KAWACHI MASARU
分类号
C30B11/00;C30B29/48;H01L21/365;H01L21/42
主分类号
C30B11/00
代理机构
代理人
主权项
地址
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