| 摘要 |
PURPOSE:To distinguish the phase (distributing state) of compound by forming the hystogram of image luminance value of the characteristic X rays of a constituent element, and displaying only the multiplexed value of each peak in the hystogram on a matrix picture with the different colors. CONSTITUTION:An electron beam is made to scan, and the energy intensity of characteristic X rays is measured. The energy intensity is converted into the image luminance value. Then, an image luminance value hystogram is formed for the respective element. The peaks A, B and C in the hystogram H are multiplexed (divided into the parts of (a), (b) and (c)) so that the lower parts are not interfered. Only the multiplexed parts (a), (b) and (c) are displayed by the different colors or symbols on one matrix picture having the number of the picture elements corresponding to matrix-shaped detecting-point regions and addresses. In this way, the regions and the boundaries of the peaks A, B and C, i.e. the phases of the compounds constituting a specimen can be clearly distinguished and obtained. |
