| 摘要 |
PURPOSE:To enable presence/absence of a miss-fire to be judged easily by incorporating a miss-fire detector with a diode as a detector into a case which is electromagnetically shielded. CONSTITUTION:Noise detectors 11, 12, 15, and 16 for detecting high-frequency electromagnetic noise generated when starting discharge are provided as a means for detecting discharge miss-fire within a case 13 which is electromagnetically shielded. Then, when the noise detectors 11, 12, 15, and 16 do not detect high-frequency electromagnetic noise regardless of application of high voltage, it is judged to be a miss-fire. Thus, it becomes possible to positively judge miss-fire signal and the device can be fully applied to a TEA laser with relatively low output level and discharge noise level. |
