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发明名称
POLISHING DEVICE FOR DIAMOND FILM
摘要
申请公布号
JPH07328909(A)
申请公布日期
1995.12.19
申请号
JP19940130183
申请日期
1994.06.13
申请人
CANON INC
发明人
YOKOTA MASAAKI
分类号
B24B1/00;B24B13/00;B24B19/00;C30B29/04;C30B33/00;(IPC1-7):B24B19/00
主分类号
B24B1/00
代理机构
代理人
主权项
地址
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