PROCESS FOR DETECTING THE ATTAINMENT OF A PREDETERMINED DEPTH IN TARGET BODY EROSION AND TARGET BODY THEREFOR

摘要

In order to indicate when erosion of a target body (1) to be sputtered in a cathode sputtering process has reached a given depth (D), discontinuity sites formed by primary material to be sputtered (M1) and indication material (M2) are provided. Measurement signals are generated by a measurement transducer (11) which measures a quantity (s) which is propagated through the processing atmosphere (P) or through electric power supplies.