Method of producing thin film.

摘要

There is disclosed a method of producing a thin film. Ions and electrons (13) are applied from an ion gun (12) to a polymer film (1) while the polymeric film is traveling circumferentially on a peripheral surface of a cylindrical can (2). Subsequently, electrons (7) are applied from an electron gun (8) to the polymer film. Subsequently, the thin film is deposited on the polymer film (1) by vacuum evaporation. With this method, the thin film, having no wrinkle and a high strength of adhesion to the polymer film, can be produced in a stable manner.