| 摘要 |
PURPOSE:To easily use the title apparatus even in a sample whose surface to be measured or sensor mount surface is curved or a large sample by forming an interdigital electrode to the surface of a thin piece of a predetermined piezoelectric material. CONSTITUTION:An elastic surface wave apparatus 1 is formed by mounting an interdigital electrode 3 on one surface of a thin piece 2 which is composed of an org. polymer piezoelectric material and whose end part 2a in a sonic wave propagating direction P becomes thin toward the leading end thereof. This apparatus is bonded to a sample to be measured so that the surface having the electrode 3 mounted thereon is turned downwardly to generate a sonic wave reflected echo and the flaw of the sample is detected. By this constitution, the elastic surface wave apparatus can be easily used even in a sample whose surface to be measured or sensor mount surface is curved or a large sample. |
