ABRASIVE COMPOSITION FOR SILICON WAFER,申请号EP19890906447-传众专利搜索

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发明名称	ABRASIVE COMPOSITION FOR SILICON WAFER
摘要
申请公布号	EP0371147(A4)	申请公布日期	1990.09.19
申请号	EP19890906447	申请日期	1989.06.02
申请人	MITSUBISHI MONSANTO CHEMICAL COMPANY	发明人	SASAKI, SHIGEO MITSUBISHI MONSANTO CHEMICAL CO.
分类号	C09K3/14;H01L21/306;(IPC1-7):C09K3/14;H01L21/304	主分类号	C09K3/14
代理机构		代理人
主权项
地址

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