发明名称 |
Method and apparatus for determining the degree of oxidation of an oxide coating |
摘要 |
A method and apparatus determines the thickness of a copper oxide coating of an object by measuring the quantity of light reflected from the object in at least two wavelength zones, and then determining a value for a relationship between those quantities, for example, the ratio or difference of those quantities. The value is then compared to a predetermined, regular correspondence between such values and copper oxide thicknesses to determine the object's copper oxide thickness.
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申请公布号 |
US4957370(A) |
申请公布日期 |
1990.09.18 |
申请号 |
US19890404050 |
申请日期 |
1989.09.06 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
TOMINAGA, MAMORU;MORI, LEO;AKIYAMA, JUNETSU |
分类号 |
G01N21/27;G01B11/06;G01N21/31 |
主分类号 |
G01N21/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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