发明名称 Method and apparatus for determining the degree of oxidation of an oxide coating
摘要 A method and apparatus determines the thickness of a copper oxide coating of an object by measuring the quantity of light reflected from the object in at least two wavelength zones, and then determining a value for a relationship between those quantities, for example, the ratio or difference of those quantities. The value is then compared to a predetermined, regular correspondence between such values and copper oxide thicknesses to determine the object's copper oxide thickness.
申请公布号 US4957370(A) 申请公布日期 1990.09.18
申请号 US19890404050 申请日期 1989.09.06
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TOMINAGA, MAMORU;MORI, LEO;AKIYAMA, JUNETSU
分类号 G01N21/27;G01B11/06;G01N21/31 主分类号 G01N21/27
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