发明名称 Large aperture ion-optical lens system
摘要 A lens system for a beam of energetic ions employs a focusing element in combination with a defocusing element. In a preferred embodiment, the focusing element is in the form of an electromagnetic lens, such as a solenoid, through which is propagated the beam of energetic ions. Also in the beam path is provided a defocusing element which also may be in the form of an electromagnetic element, such as a solenoid, or a magnetic element, such as a magnetic dipole. Alternatively, an electrostatic defocusing element may be employed in the practice of the invention. In a magnetic embodiment, defocusing is achieved by propagating the beam of energetic ions around the exterior of the defocusing element. The focusing element may be of the electrostatic variety, such as a radial an electric field lens. In other embodiments, a further focusing element, or a further defocusing element may be arranged in the beam path.
申请公布号 US4958078(A) 申请公布日期 1990.09.18
申请号 US19890293694 申请日期 1989.01.05
申请人 THE UNIVERSITY OF MICHIGAN 发明人 BECCHETTI, FRED D.
分类号 H01J37/10 主分类号 H01J37/10
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