发明名称 |
Thin film transistor array and method of manufacturing the same |
摘要 |
A self-aligned TFT array for liquid-crystal display devices and a method of manufacturing the array are disclosed. A protective insulating layer on a semiconductor layer is exactly aligned with a gate electrode. A self-alignment method is used for patterning the protective insulating layer and an impurity-doped semiconductor layer on the semiconductor layer. No lift-off process is necessary.
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申请公布号 |
US4958205(A) |
申请公布日期 |
1990.09.18 |
申请号 |
US19880188623 |
申请日期 |
1988.04.29 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TAKEDA, MAMORU;YAMASHITA, ICHIRO;KITAHIRO, ISAMU |
分类号 |
G02F1/1368;H01L29/45;H01L29/786 |
主分类号 |
G02F1/1368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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