| 摘要 |
<p>PURPOSE:To stabilize an electric characteristic by forming a thin film of titanium carbide and silicon carbide or of zirconium carbide and silicon carbide followed by heat treatment by a laser. CONSTITUTION:After forming a composite material of a titanium carbide and silicon carbide or of zirconium carbide and silicon carbide, heat treatment by a laser is performed. Accordingly, silicon carbide acts as an insulator at a low temperature in titanium carbide or zirconium carbide while acting as an electric conductor at a high temperature so that temperature dependency of resistivity can be reduced. Further, when local heating by a laser is applied to the thin film formation by chemical vapor deposition or physical vapor deposition, titanium carbide and zirconium carbide, which are hard to crystallize, are previously crystallized so that generation of a resistance value change accompanying a crystallization phenomen due to heat generated at the time of a continuous printing action can be prevented. Thereby, an electric characteristic can be stabilized.</p> |
