PRODUCTION OF FLAT DISPLAY DEVICE

摘要

PURPOSE:To obtain a flat display device in which misalignment quantity is small by utilizing a real element provided on a substrate as an alignment mark. CONSTITUTION:A scanning signal line GL which is the real element provided on the lower transparent glass substrate SUB 1 is utilized as the alignment mark. The alignment mark AM1 is provided in an effective pattern on the lower transparent glass substrate SUB 1 and the alignment mark AM2 is provided in an effective pattern on a photomask for forming an (i) type semiconductor layer pattern. Therefore, a distance between the alignment mark and the end part of the effective pattern becomes short. Thus, the misalignment quantity of an (i) type semiconductor layer AS on the end part of the effective pattern becomes small and the positional deviation quantity of the (i) type semiconductor AS from a gate electrode GT is made small.