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发明名称
GERAET ZUR WAFER-INSPEKTION.
摘要
申请公布号
AT56275(T)
申请公布日期
1990.09.15
申请号
AT19850107360T
申请日期
1985.06.14
申请人
HEIDELBERG INSTRUMENTS GMBH
发明人
BILLE, JOSEF, PROF. DR.;HUNKLINGER, SIEGFRIED, PROF. DR.
分类号
G01N21/64;G01N21/88;G02B21/00;G02B26/10;(IPC1-7):G01N21/88
主分类号
G01N21/64
代理机构
代理人
主权项
地址
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