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发明名称
THIN-FILM FORMING DEVICE
摘要
申请公布号
JPH02232371(A)
申请公布日期
1990.09.14
申请号
JP19890049918
申请日期
1989.03.03
申请人
NEC CORP
发明人
HOSHINO SHIGEKI
分类号
C30B25/02;C23C16/27;C23C16/50;C23C16/503;C30B29/04;H01L21/205;H01L21/263;H01L21/31
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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