摘要 |
PURPOSE:To synthesize Fe-Si-C series super fine particles at high purity by rapidly cooling after reacting silane, methane and iron carbonyl in high frequency heat plasma of ultra high temp. range. CONSTITUTION:The raw material gas composed of silane, methane and iron carbonyl is fed into torch system in the high frequency heat plasma apparatus 1 from upper part of a torch 3 for reaction and reacted in the plasma of argon, etc., at about 4000-10000 deg.C. The generated Fe-Si-C series fine particles are rapidly cooled in the rapid cooling system made of silica-tube, etc., and collected with the inner wall (A) of the torch 3 for reaction and the inner wall (B) of silica-tube in the rapid cooling system. The obtd. super fine particles is useful to the synthesis of catalyst showing high catalytic activity, because of high olefin activity or high CO conversion ratio. |