| 摘要 |
<p>PURPOSE:To improve the performance of the sensor because the influence of lateral acceleration is reduced by providing a means which prevent air bubbles from gathering in damping liquid charged in a chamber wherein an acceleration detecting means is installed. CONSTITUTION:A sensor element consisting of a cantilever 4a, etc., is mounted on a stem 100. The damping liquid 700 such as silicone oil is injected into a shell 600 by a specific amount so that at least a 1st chamber A is nearly filled after the package is sealed. Even if air 800 enters the chamber A owing to a swing, etc., the air 800 moves up along a bulkhead plate 905 to return to a 2nd chamber B through a communication hole 904 for air. Excessive liquid 700, on the other hand, returns to the chamber A through a communication hole 903 for damping. Consequently, any lateral acceleration which deteriorates directivity does not operate on the cantilever 4a of a semiconductor acceleration sensor, only object acceleration to be detected can be detected, and its characteristics are improved.</p> |
