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发明名称
SIC TUBE
摘要
申请公布号
JPH02230725(A)
申请公布日期
1990.09.13
申请号
JP19890051406
申请日期
1989.03.03
申请人
SEIKO EPSON CORP
发明人
IWAMATSU SEIICHI
分类号
C04B41/87;H01L21/22
主分类号
C04B41/87
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代理人
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