| 摘要 |
<p>PURPOSE:To eliminate voltage distribution in a beam running direction, in a deflecting direction and in a lateral direction by propagation deflecting voltage, at a propagation speed almost the same as the beam running speed, from an input side end face in the beam running direction of a plate electrode to an output side end face. CONSTITUTION:When the beam of a charged particle 30 is deflected by a progressive wave magnetic field in vacuum, connecting leads 36, 38 are provided each of which has homogeneous structure in a lateral direction X that is orthogonal to a beam running direction Z and to a deflecting direction Y, and by which deflecting voltage is applied to a pair of plate electrodes 32, 34 opposed to one another being continuously formed in the beam running direction as well as to the end face in the beam running direction of the plate electrode 32. The deflecting voltage from a deflecting voltage generator 40 is propagated at a propagation speed almost the same as the beam running speed from an input side end face 32A in the beam running direction of the plate electrode 32 to an output side end face 32B. Voltage distribution in a beam running direction of a deflecting electrode, in a deflecting direction, and in a lateral direction are thus eliminated.</p> |
