| 摘要 |
PURPOSE:To detect a positional deviation of a part accurately and easily by irradiating an object to be inspected with slit lights along an allowable range of the positional deviation thereof, and the interrupted line of the light is taken to extract geometric features of an image thereof. CONSTITUTION:A substrate on which parts 1 to be inspected are mounted is irradiated downward with slit lights 17a-17d to generate light interrupted lines 18a-18d along a boundary of an allowable range 2 of positional deviation of the parts. Then, an arithmetic controller reads a program to control a photographing operation of cameras 13a-13d and a movement of a measuring table and others in a series by a control signal. The arithmetic controller picks up a video signal from the cameras 13a-13d to extract geometric features of the light interrupted lines 18a-18d thereby judging whether the parts are positioned correctly or not within the allowable range 2 of positional deviation. |
