| 摘要 |
PURPOSE:To improve film thickness, film forming speed, and the denseness of a film by forming a solid electrolyte comprising a YSZ film on the surface of a fuel electrode by a laser PVD method. CONSTITUTION:A solid electrolyte comprising a YSZ thin film is formed on the surface of a fuel electrode 6 by a laser PVD method. By using the laser PVD method, high power laser beams are irradiated on a YSZ vapor deposition mother material of a target 5 to heat and vaporize, and the dense YSZ thin film is deposited on the base material of the fuel electrode 6. The film thickness is made thin, and 10-100 times faster film forming speed than that of an EVD method or a sintering method can be obtained. |
