| 摘要 |
PURPOSE:To reduce labor and time necessary for inspection of an object to be inspected significantly by radiating an ultrasonic wave through an acoustic lens from an ultrasonic sensor section to receive reflected wave with the ultrasonic sensor section through the acoustic lens. CONSTITUTION:Ultrasonic sensor section 17 focuses an ultrasonic wave on an object to be inspected and has an acoustic lens 14 to transmit reflected ultrasonic wave therefrom to the sensor-section 17 and an optical fiber 15 to transmit or receive a light beam to the object to be inspected piercing the center of the sensor section 17 and the acoustic lens 14. Then, the ultrasonic wave is radiated to the object to be inspected through the acoustic lens 14 from the sensor section 17 and reflected wave is received with the sensor section 17 through the acoustic lens 14 to be converted into an electrical signal. At the same time, a light beam is radiated from the optical fiber 15 and reflected wave thereof is inputted through the optical fiber 15 to be converted into an electrical signal. Thus, these electrical signals are processed thereby enabling the obtaining an ultrasonic image of the object to be inspected and an image of an optical microscope simultaneously. |
