发明名称 |
Elimination of turbulence for silicon micromachined airflow sensor |
摘要 |
The sensor comprises a silicon sensing element on a ceramic substrate. A slot is provided in the substrate just ahead of the leading edge of the silicon so that some of the airflow that is flowing toward the leading edge surface of the silicon passes through the slot. This promotes a less turbulent flow over the sensing face of the silicon.
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申请公布号 |
US4955230(A) |
申请公布日期 |
1990.09.11 |
申请号 |
US19890390597 |
申请日期 |
1989.08.07 |
申请人 |
SIEMENS-BENDIX AUTOMOTIVE ELECTRONICS L.P. |
发明人 |
HALL, BRYAN C. |
分类号 |
G01F1/684;G01F5/00 |
主分类号 |
G01F1/684 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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