,申请号JP19890021644U-传众专利搜索

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发明名称
摘要
申请公布号	JPH02113332(U)	申请公布日期	1990.09.11
申请号	JP19890021644U	申请日期	1989.02.27
申请人		发明人
分类号	B08B3/10;B01F3/04;H01L21/00;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B3/10
代理机构		代理人
主权项
地址

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