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发明名称
METHOD AND DEVICE FOR STABILIZATION CONTROL OF OUTPUT OF FLUORINE EXCIMER LASER
摘要
申请公布号
JPH02228086(A)
申请公布日期
1990.09.11
申请号
JP19890048185
申请日期
1989.02.28
申请人
CENTRAL GLASS CO LTD
发明人
NAKAGAWA SHINSUKE;NAKANO HISAHARU;KODAMA MITSUO;ICHIMARU HIROSHI;TAINAKA MASAHIRO
分类号
H01S3/097;H01S3/134
主分类号
H01S3/097
代理机构
代理人
主权项
地址
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