| 摘要 |
PURPOSE:To improve the economy and reliability by forming an organic film on a piezoelectric substrate side, arranging an input and an output electrode on another substrate, and replacing only the organic thin film after the device is used and using the input and output electrodes repeatedly. CONSTITUTION:This chemical material detecting device is constituted of the piezoelectric substrate 13 where the organic thin film 14 which adsorbs a chemi cal material to be detected is adhered and the substrate (insulating substrate) 41 which has the input electrode 11 and output electrode 12 composed of inter- digital electrodes. The substrates 13 and 41 are put one over the other in contact with the sides where the electrodes 11 and 12 are arranged in. In this case, a gap part 42 where the outside atmosphere, i.e. the chemical material to be detected is put is formed between the substrates 13 and 41 in at least part of the thin film 14. The gap part 42 is formed by forming a recessed part 43 in, for example, the substrate 41 opposite the substrate 13 and further boring a through hole 44 in the bottom part. Consequently, the thin film 14 can be replaced irrelevantly to the electrodes 11 and 12 of high-accuracy fine patterns without damaging the electrodes. |
