| 摘要 |
PURPOSE:To obtain a high sensitivity and selectivity and fast responsiveness by adopting a structure which has electrodes at both ends and has solns. on both sides of a thin dielectric film having thin amorphous silicon films. CONSTITUTION:The thin films 3, 4 of silicon dioxide and phosphorusdoped amorphous silicon and the electrodes 5 are mounted onto a silicon substrate 2 having many window regions 1. One surface of the thin film 3 comes into contact with an electrolyte 6 and the other surface with an electrolyte 7 contg. enzyme. The latter is isolated from the outdoor air by a thin porous 'Teflon(R)' film 8. The entire part of the system is sealed by a partition wall 9. Many pieces of such systems are connected in series or parallel. Since these systems oscillate in synchronization with each other, the S/N of an output signal is high and since the area of the regions 1 is small, the mechanical strength of the thin film 3 is high and the frequency of the self-excited oscillation is high. The detection of a deviation in the detection signals is thus facilitated. The high sensitivity and the high selectivity are obtd. in this way and the high-speed operation is enabled. |
