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发明名称
MANUFACTURE OF ELECTRONIC COMPONENT
摘要
申请公布号
JPH02226752(A)
申请公布日期
1990.09.10
申请号
JP19890047635
申请日期
1989.02.28
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KOYAMA MASAHIDE
分类号
H01L21/60;H01L21/66;H01L23/50
主分类号
H01L21/60
代理机构
代理人
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