| 摘要 |
PURPOSE: To make it possible to obtain oscillation of high yield by providing optical diffraction grating provided to oscillate, and means for receiving narrow band width of a spectrum dispersed by the grating. CONSTITUTION: A spectrophotometer 11 has a light reflecting diffraction grating 13 provided to oscillate in its spectrometer chamber, the light incident through an inlet slit 14 is reflected by the grating 13, and dispersed in the spectrum via an outlet slit 16. As the grating 13 is oscillated, the wavelength of the narrow band passed through the slit 16 is accurately inspected via the spectrum. Then, the light passed through the slit 16 is received by an outlet slit optics 18, and guided to a sample 20. Thereafter, the reflected light from the sample 20 is detected by a photodetector 22. The output signal from the detector 22 is amplified by an amplifier 24, converted into a digital signal by an A-D converter 26, and the digital value is analyzed by a computer 47. |
