发明名称 METHOD AND DEVICE FOR GROWTH OF DIAMOND
摘要 Preferred embodiments first adjust reactor conditions to grow a diamondlike film (114) on a silicon substrate (102). Reactor conditions are then adjusted to etch the diamondlike film surface, providing a high density of diamond nucleation sites (108). Finally, the reactor conditions are adjusted to grow a uniform diamond film (116) on the conditioned diamondlike surface.
申请公布号 JPH02225398(A) 申请公布日期 1990.09.07
申请号 JP19890210012 申请日期 1989.08.14
申请人 TEXAS INSTR INC <TI> 发明人 ANDORIYUU JIEE PAADESU
分类号 C30B29/04;C04B41/50;C23C16/02;C23C16/26;C23C16/27;C30B25/02;H01L21/20;H01L21/205;H01L21/31 主分类号 C30B29/04
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