| 摘要 |
<p>A piezoelectric device (40) comprises a piezoelectric device (30), a contact layer (401), a diffusion block layer (402), a lower electrode (403) formed over the diffusion block layer (402), a piezoelectric film (404) formed over the lower electrode (403), and an upper electrode (405) formed over the piezoelectric film (404) and acting as the counterpart of the lower electrode (403). The contact layer (401) includes a material for improving contact between the piezoelectroc device (30) and lower electrode (403), and the diffusion bloc layer (402) includes a material for preventing constituents of the contact layer (401), composed mainly of titanium, from diffusing into the lower electrode (403).</p> |
