PRODUCTION OF ALUMINUM NITRIDE PRODUCTS

摘要

PURPOSE:To maintain high electric insulation with reliability increased by surface-treating aluminum nitride ceramics after irradiation with laser beams and removing the deposited metal components on the surface. CONSTITUTION:A aluminum nitride ceramics is processed into a desired shape by irradiation with laser beams. The irradiated parts are surface-treated through the hone process or the like. Then, the metal component (Al) deposited on the surface is removed. Thus, the electric insulation of the aluminum nitride ceramics is kept high with reliability increased.