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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH02225666(A)
申请公布日期
1990.09.07
申请号
JP19890045960
申请日期
1989.02.27
申请人
TOKUDA SEISAKUSHO LTD
发明人
KURIYAMA NOBORU
分类号
C23C14/35;H01L21/203
主分类号
C23C14/35
代理机构
代理人
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