| 摘要 |
A device on an oxidation or diffusion oven for manufacturing semiconductors is useful for charging and sealing the stove pipe with wafers placed on trays, by means of a motor-powered paddle. The trays have four feet arranged in pairs on both sides which project downward and rest on the stove pipe. The trays can be gripped at the centre directly from below by the paddle. The tubular paddle shaft is fastened by a paddle holder arranged on a sliding guide. The paddle holder can be adjusted about a horizontal Y-axis perpendicular to the X-axis, can be tilted about a horizontal C-axis perpendicular to the X-axis and can swivel about a vertical B-axis perpendicular to the X-axis. The paddle holder is supported on a horizontal carrier plate mounted on the guide slide of the Z-axis. A rotary disk which pivots about a vertical B-axis in a step bearing is inserted between the carrier plate and the paddle holder. The paddle holder is fastened by screw connections after the stove pipe is adjusted by means of a laser beam. |
