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发明名称
FILM FORMATION
摘要
申请公布号
JPH02225677(A)
申请公布日期
1990.09.07
申请号
JP19890246343
申请日期
1989.09.25
申请人
SUMITOMO ELECTRIC IND LTD
发明人
AIHARA TOMOYASU;KAWAI CHIHIRO;IGARASHI TADASHI
分类号
C23C16/00;C23C24/00;C23C26/00
主分类号
C23C16/00
代理机构
代理人
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地址
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