SELECTIVE FORMATION METHOD FOR METALLIC FILM,申请号JP19890044264-传众专利搜索

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发明名称	SELECTIVE FORMATION METHOD FOR METALLIC FILM
摘要
申请公布号	JPH02224245(A)	申请公布日期	1990.09.06
申请号	JP19890044264	申请日期	1989.02.25
申请人	SONY CORP	发明人	KOMATSU YUJI
分类号	H01L21/3205;H01L21/28	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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