发明名称 METHOD FOR DETECTING POSITION OF HYBRID INTEGRATED CIRCUIT SUBSTRATE
摘要 PURPOSE:To prevent the generation of a recognition error due to a flaw by forming a recognition mark consisting of the 1st area with the 1st color and the 2nd area with the 2nd color arranged on the outside of the 1st area and functioning a projection part as a protection area for the 2nd area. CONSTITUTION:The recognition mark 12 consisting of the 1st area 13 with the 1st color and the 2nd area 14 with the 2nd color arranged on the outside of the 1st area 13 and the projection part 15 projected from the 2nd area 14 based upon the 1st area 13 is arranged around the 2nd area 14. The position of the substrate 11 is detected by image recognition utilizing the 1st and 2nd areas 13, 14. Since the 1st and 2nd areas 13, 14 surrounded by the projection part 15 like a bank are used as a recognition area 19, pattern recognition can be executed independently of a flaw formed on the projection part 15. Consequently, the generation of a recognition error due to the flaw of the recognition mark 12 can be reduced.
申请公布号 JPH02224184(A) 申请公布日期 1990.09.06
申请号 JP19890045891 申请日期 1989.02.27
申请人 TAIYO YUDEN CO LTD 发明人 KIMURA TAKASHI;TSUMITA YOSHIYUKI
分类号 H05K13/04;G06T1/00;G06T7/00;H01L21/52;H01L21/60;H05K1/02;H05K3/00;H05K13/00 主分类号 H05K13/04
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