| 摘要 |
PURPOSE:To decrease temperature drifts by rotational-transforming the translation displacement of a piezoelectric actuator via a lever, translation-transforming the rotational angle of a pinion that is engaged with a gear for rotational amplification, and sensing the translation amount without contact. CONSTITUTION:A command voltage is controllably amplified to cause a piezoelectric actuator 5 to operate. The very small displacement of the piezoelectric actuator 5 is rotational-transformed by a lever 6, and the rotational angle is amplified by using the gear 7 to pinion 8 ratio. This amplified rotational angle is rotational-transformed by a rotation detection section 10 and detected by a noncontact position sensor 9. Thus, a friction load is small as a whole, and the position sensor 9 has temperature drifts only a small fraction or below of that of a capacitance type, thereby less affecting the precision. |
