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发明名称
FORMATION OF DEPOSITED FILM
摘要
申请公布号
JPH02222535(A)
申请公布日期
1990.09.05
申请号
JP19890044714
申请日期
1989.02.23
申请人
ROHM CO LTD
发明人
HOSONO HITOSHI
分类号
H01L21/306;H01L21/027
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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