摘要 |
<p>A field emission device which may be used, for example, as a surge arrester, comprises two electrode structures (16,17) each comprising a substrate (2) from which project tapered electrically-conductive emitter bodies (7). The structures are bonded together, face-to-face, so that the emitters all project into a sealed space (19) formed between the substrates. The space may be evacuated or gas-filled. The emitterr are formed by depositing a conductive layer (1) on each substrate, forming masking pads (5) on the layer at the required emitter positions, and etching the conductive layer to leave a tapered body beneath each pad. The dimensions of the emitter bodies and the spacing between the substrates are preferably of the order of a few microns.</p> |