发明名称 ENVIRONMENT CONTROLLER, SEMICONDUCTOR PRODUCTION SYSTEM AND INSPECTING/MEASURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To suppress temperature fluctuation of conditioned air by providing an air cooling means with a heat exchanger for cooling a secondary medium with a primary medium, and means for circulating the secondary medium. SOLUTION: In a refrigerating machine 6, high temperature refrigerant gas (b) pressurized by means of a compressor 7 is liquefied by means of a condenser 8 through heat exchange with cooling water (c). The refrigerant liquid passes through an expansion valve, and the like, to produce low temperature refrigerant (b') through vaporization and adiabatic expansion and the refrigerant (b') enters into a heat exchanger (evaporator) 17 for cooling secondary refrigerant. The evaporator 17 robs heat from secondary refrigerant (d) which is then pressurized again by means of the compressor 7. The secondary refrigerant (d) being fed by means of a pump 19 is cooled by means of the evaporator 17 and used by a heat exchanger 3' for cooling the conditioned air. After robbing heat from the conditioned air, the secondary refrigerant (d) is collected in a tank 18 and introduced to the evaporator 17 again by means of the pump 19. Pure water, antifreeze solution, PFC liquid, or the like, is employed as the secondary refrigerant.
申请公布号 JP2000283500(A) 申请公布日期 2000.10.13
申请号 JP19990085610 申请日期 1999.03.29
申请人 CANON INC 发明人 NAKANO KAZUSHI
分类号 H01L21/027;F24F3/16;F24F5/00;F25B25/00;G03F7/20;H01L21/02;(IPC1-7):F24F5/00 主分类号 H01L21/027
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